Challenge for MEMS Mirror
A large optical aperture is a key enabler for a high-performance LiDAR in terms of detection range and resolution. State-of-the-art MEMS LiDAR uses several techniques to increase the MEMS aperture over traditional MEMS mirrors, but at the expense of reliability, cost, and production capacity.
inSync's Solution
Our patented array-based MEMS mirror is scalable in aperture size by design and can achieve more than an order of magnitude aperture increase over existing MEMS mirrors. The current product has a world-record aperture of 290 mm2. All the mirror elements in the array are automatically synchronized with the help of nonlinear coupling to avoid control complexity (that is, only one single driving signal!).
inSync's Solution
Reliability
Reliability is critical for MEMS LiDAR to be massively deployed in automobiles. And it is also one of the key characteristics that distinguish inSync MEMS mirror array from other existing MEMS mirrors. Our MEMS mirror shows no structural damage after the 1500G required by AEC-Q100 automotive standard.
The fundamental reason for the high reliability is that each mirror element with a small moment of inertia is individually suspended by stiff silicon springs. The small feature size guarantees our MEMS mirror to inherit the high reliability of micro-devices.
Reliability
Reliability is critical for MEMS LiDAR to be massively deployed in automobiles. And it is also one of the key characteristics that distinguish inSync MEMS mirror array from other existing MEMS mirrors. Our MEMS mirror shows no structural damage after the 1500G required by AEC-Q100 automotive standard.
The fundamental reason for the high reliability is that each mirror element with a small moment of inertia is individually suspended by stiff silicon springs. The small feature size guarantees our MEMS mirror to inherit the high reliability of micro-devices.
Reliability
Reliability is one of the key characteristics that let inSync MEMS mirror array stands out. Our MEMS mirror shows no structural damage after the 1500G shock test (AEC-Q100 automotive standard).
The fundamental reason for the high reliability is that each mirror element stays small and light-weighted. We don’t need to trade reliability for size.
Our MEMS mirror array is very robust under vibration. In the demo above, the MEMS mirrors are mounted onto a vibration table to simulate rough road conditions. A laser beam is projected onto the mirrors so that the stability of the MEMS mirrors can be observed by the stability of the reflected beam.
Supreme stability even operated under open loop control (Pothole shock test (GMW3172), random vibration test (ISO-16750-3), and temperature oscillation (70°C)). The stability can be further improved by adopting closed-loop control with our integrated rotation angle sensing technology.
2D Hybrid Scanner
The slow-axis of the 2D hybrid scanning mirror is driven by an electromagnetic scanner which can follow arbitrary control waveforms. The demo above shows the 2D scanning mirror scanning 60° × 15° at 5 fps.
Typical Scanning Pattern
Reference LiDAR Design
The large aperture allows LiDAR to see further and clearer. As a demo, a reference LiDAR design with our MEMS scanning mirror can achieve resolution equivalent to a 250-line mechanical LiDAR with 200m effective range.